Electronic Instrumentation Laboratory
Department of Microelectronics

dr.ir. R.F. Wolffenbuttel

Guest
Electronic Instrumentation (EI), Department of Microelectronics

Expertise: Instrumentation and measurement, on-chip functional integration of microelectronic circuits and silicon sensor, fabrication compatibility issues and micromachining in silicon and microsystems in particular.

Biography

Reinoud F. Wolffenbuttel received a M.Sc. degree in 1984 and a Ph.D. degree in 1988, both from the Delft University of Technology. His thesis dealt with the application of silicon to color sensing. Between 1986 and 1993 he has been an assistant professor and since 1993 he has been an associate professor at the Department of Microelectronics, Faculty of Information Technology and Systems of the Delft University of Technology and is involved in instrumentation and measurement in general and on-chip functional integration of microelectronic circuits and silicon sensor, fabrication compatibility issues and micromachining in silicon and microsystems in particular. He published over 450 papers at international conferences and peer-reviewed journals on these subjects. He was a visitor at the University of Michigan, Ann Arbor, USA in 1992, 1999 and 2001, Tohoku University, Sendai, Japan in 1995 and EPFL Lausanne, Switzerland in 1997. He is the recipient of a 1997 NWO pioneer award. He served as general chairman of the Dutch national sensor conference in 1996, Eurosensors in 1999 and MicroMechanics Europe in 2003 and as chairman of the MME steering committee between 2003 and 2008. He is presently chairman of the IEEE BeNeLux Chapter on Instrumentation and Measurement.

Publications

  1. MEMS for biofuel composition measurement based on thermal impedance spectroscopy
    Ghaderi, Mohammadamir; Jiang, Bo; Bossche, Andre; Visser, Jaco H; Wolffenbuttel, Reinoud F;
    Sensors and Actuators B: Chemical,
    Volume 277, pp. 281--288, December 2018. DOI: 10.1016/j.snb.2018.08.098
    Abstract: ... Continuous monitoring of the composition of E85 biofuel is essential for a quick start and clean and efficient operation of Flex-Fuel Vehicles. The actual ethanol concentration in E85 fuel is in the range 50%–85% and fuel-line sensors are used for ethanol-gasoline composition measurement. However, also a small amount of water is typically present, which cannot be reliably detected using state-of-the-art capacitive fuel-line sensors. Thermal impedance spectroscopy has been investigated as a non-destructive technique to determine the composition of ternary mixtures of biofuels. The principle of the thermal conductivity detector has been extended for measuring both the thermal conductivity and the thermal capacity of biofuel in the range up to 10 kHz using an AC-operated polysilicon heater for injecting a sinusoidal heat flux, and another polysilicon strip at a well-defined spacing or thermopile sensors for measuring the in-phase and quadrature components of the resulting AC temperature difference. Measurements on the components are in reasonable agreement with simulations, with a −3 dB cut-off frequency at 422.5 Hz and 340.8 Hz for ethanol and gasoline, respectively. However, the cut-off frequency of water was found to be significantly lower than simulations due to its high surface tension, thus limiting access to the detector.

  2. Multi-domain spectroscopy for composition measurement of water-containing bio-ethanol fuel
    L.M. Middelburg; G. de Graaf; A. Bossche; J. Bastemeijer; M. Ghaderi; F.S. Wolffenbuttel; J. Visser; R. Soltis; R.F. Wolffenbuttel;
    Fuel Processing Technology,
    Volume 167, pp. 127-135, 2017. DOI: 10.1016/j.fuproc.2017.06.007
    Abstract: ... Measuring the ethanol/water ratio in biofuel of high ethanol content, such as E85, is important when used in a flex-fuel engine. A capacitive probe is generally used for measuring the ethanol/gasoline ratio. However, the water content in E85 biofuel cannot be disregarded or considered constant and full composition measurement of biofuel is required. Electric impedance spectroscopy with a customized coaxial probe operating in the 10 kHz to 1 MHz frequency range was investigated. An in-depth investigation of the electrical impedance domain has led to the conclusion that additional information is required to unambiguously determine the composition of the ternary biofuel mixture. Among the different options of measurement domains and techniques, optical absorption spectroscopy in the UV spectral range between 230 and 300 nm was found to be the most appropriate. The typical absorbance in the UV range is highly dominated by gasoline, while ethanol and water are almost transparent. This approach is experimentally validated using actual fuels.

  3. Functionalizing a Tapered Microcavity as a Gas Cell for On-Chip Mid-Infrared Absorption Spectroscopy
    N. Pelin Ayerden; Julien Mandon; Frans J. M. Harren; Reinoud F. Wolffenbuttel;
    Sensors,
    Volume 17, Issue 9}, ARTICLE NUMBER = {204, 2017. DOI: 10.3390/s17092041
    document

  4. Fabrication Tolerance Sensitivity in Large-Area Mid-Infrared Metamaterial Absorbers
    Mohammadamir Ghaderi; Ehsan Karimi; N. Pelin Ayerden; Reinoud F. Wolffenbuttel;
    Proceedings,
    Volume 1, Issue 4}, ARTICLE NUMBER = {328, 2017. DOI: 10.3390/proceedings1040328
    document

  5. The Miniaturization of an Optical Absorption Spectrometer for Smart Sensing of Natural Gas
    N. P. Ayerden; R. F. Wolffenbuttel;
    IEEE Transactions on Industrial Electronics,
    Volume 64, Issue 12, pp. 9666 - 9674, 2017. DOI: 10.1109/TIE.2017.2719600
    Keywords: ... Absorption;Detectors;Mirrors;Optical device fabrication;Optical resonators;Optical sensors;Sensitivity;Gas sensor;microspectrometer;mid-IR;natural gas;optical absorption spectroscopy.

  6. PDMS Microlenses for Optical Biopsy Microsystems
    J. F. Ribeiro; A. C. Costa; J. M. Gomes; C. G. Costa; S. Goncalves; R. F. Wolffenbuttel; H. Correia;
    IEEE Transactions on Industrial Electronics,
    Volume 64, Issue 12, pp. 9683 - 9690, 2017. DOI: 10.1109/TIE.2017.2716874
    Keywords: ... Biomedical optical imaging;Biopsy;Lenses;Light emitting diodes;Microoptics;Optical device fabrication;Optical imaging;Biomedical imaging;Microlens;Optic microsystem;Optical biopsy;Polydimethylsiloxane (PDMS).

  7. Combining impedance spectroscopy with optical absorption spectroscopy in the UV for biofuel composition measurement
    L. Middelburg; M. Ghaderi; A. Bossche; J. Bastemeijer; G. de Graaf; R.F. Wolffenbuttel; R. Soltis; J. Visser;
    In Instrumentation and Measurement Technology Conference (I2MTC), 2017 IEEE International,
    IEEE, IEEE, pp. 1-6, 05 2017. DOI: 10.1109/i2mtc.2017.7969676
    Abstract: ... A capacitive probe is generally used in a flex-fuel engine for measuring the ethanol content in biofuel. However, the water content in biofuel of high ethanol content cannot be disregarded or considered constant and the full composition measurement of ethanol, gasoline and water in biofuel is required. Electrical impedance spectroscopy with a customized capacitive probe operating in the 10 kHz to 1 MHz frequency range is combined with optical absorption spectroscopy in the UV spectral range between 230 and 300 nm for a full composition measurement. This approach is experimentally validated using actual fuels and the results demonstrate that electrical impedance spectroscopy when supplemented with optical impedance spectroscopy can be used to fully determine the composition of the biofuel and applied for a more effective engine management. A concept for a low-cost combined measurement system in the fuel line is presented.

  8. Microstructure for Thermal Impedance Spectroscopy for Biofuel Composition Measurement
    B. Jiang; M. Ghaderi; A. Bossche; J.H. Visser; R.F. Wolffenbuttel;
    In Multidisciplinary Digital Publishing Institute Proceedings,
    pp. 396, 2017. DOI: 10.3390/proceedings1040396
    Abstract: ... Thermal impedance spectroscopy has been investigated as a non-destructive technique to determine the composition of ternary mixtures of biofuels. The principle of the thermal conductivity detector has been extended for measuring both the thermal conductivity and the thermal capacity of biofuel in the range between 1 to 100 Hz, using an AC-operated polysilicon heater for injecting a sinusoidal heat flux, and another polysilicon strip at a well-defined spacing or thermopile sensors for measuring the in-phase and quadrature components of the resulting AC temperature difference.

  9. Fabrication and characterization of MEMS airgap-based optical filters for the UV spectral range
    M. Ghaderi; R. F. Wolffenbuttel;
    In 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS),
    pp. 1959-1962, June 2017. DOI: 10.1109/TRANSDUCERS.2017.7994453
    Keywords: ... micromechanical devices;optical filters;reflectivity;silicon compounds;MEMS airgap-based optical filters;airgap Bragg reflectors;fill-factor;membrane materials;nitride layers;optical characterization;reflectance;silicon oxide layers;silicon technology;spectral reflectance;ultraviolet spectral range;Optical device fabrication;Optical filters;Optical reflection;Optical refraction;Optical variables control;Reflectivity;Airgap optical filters;Distributed Bragg reflector;Optical MEMS;Optical bandwidth;UV filters;UV spectral range.

  10. How accurate is the Fabry-Perot approximation in high-finesse linear variable optical filters for gas absorption spectroscopy?
    N. P. Ayerden; R. F. Wolffenbuttel;
    In 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS),
    pp. 2111-2114, June 2017. DOI: 10.1109/TRANSDUCERS.2017.7994491
    Keywords: ... Fabry-Perot interferometers;cavity resonators;gas sensors;optical filters;Fabry-Perot approximation;Fizeau interferometer;gas absorption spectroscopy;gas-filled linear variable optical filter;high-finesse linear variable optical filters;resonator cavity;wideband interference filter;Absorption;Cavity resonators;Mirrors;Optical filters;Optical interferometry;Optical resonators;Resonator filters;Fabry Perot;Fizeau interferometer;gas sensors;linear variable optical filter;optical absorption spectroscopy.

  11. A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy
    N. P. Ayerden; J. Mandon; M. Ghaderi; F. J. M. Harren; R. F. Wolffenbuttel;
    In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS),
    pp. 1052-1055, Jan 2017. DOI: 10.1109/MEMSYS.2017.7863593
    Keywords: ... Bragg gratings;gas sensors;infrared spectroscopy;light absorption;light reflection;micromechanical devices;optical filters;absorption path;effective optical absorption path length;functional integration;gas-filled LVOF;high-order filter operation;highly reflective Bragg mirror;hydrocarbon gas analysis;light source;linear variable optical filter;midinfrared absorption spectroscopy;on-chip gas absorption microspectrometer;photonic microsystem;physical path length;single MEMS device;tapered cavity;Absorption;Cavity resonators;Mirrors;Optical filters;Optical reflection;Optical resonators;Resonator filters.

  12. Micro thermal conductivity detector with flow compensation using a dual MEMS device
    G. de Graaf; A.A. Prouza; M. Ghaderi; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical,
    Volume 249, pp. 186-198, 2016.

  13. A miniaturized optical gas-composition sensor with integrated sample chamber
    Ayerden, N. Pelin; Ghaderi, Mohammadamir; Enoksson, Peter; de Graaf, Ger; Wolffenbuttel, Reinoud F.;
    Sensors and Actuators B: Chemical,
    Volume 236, pp. 917-925, 2016.

  14. Thermal annealing of thin PECVD silicon-oxide films for airgap-based optical filters
    M. Ghaderi; G. de Graaf; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 26, Issue 8, pp. 084009, 2016.

  15. A 45° saw-dicing process applied to a glass substrate for wafer-level optical splitter fabrication for optical coherence tomography
    M.J. Maciel; C.G. Costa; M.F. Silva; S.B. Gonçalves; A.C. Peixoto; A.F Ribeiro; R.F. Wolffenbuttel; J.H. Correia;
    Journal of Micromechanics and Microengineering,
    Volume 26, Issue 8, pp. 084001, 2016.

  16. Compact gas cell integrated with a linear variable optical filter
    N.P. Ayerden; G. de Graaf; R.F. Wolffenbuttel;
    Optics Express,
    Volume 24, Issue 3, pp. 2981-3002, 2016.

  17. A wafer-level miniaturized Michelson interferometer on glass substrate for optical coherence tomography applications
    M.J. Maciel; C.G. Costa; M.F. Silva; A.C. Peixoto; R.F. Wolffenbuttel; J.H. Correia;
    Sensors and Actuators A: Physical,
    Volume 242, pp. 210-216, 2016.

  18. Medical apps in need of optical microspectrometers
    R.F. Wolffenbuttel; T.M. Hosli Wolffenbuttel;
    Microsystem Technologies,
    Volume 22, Issue 7, pp. 1549-1555, 2016.

  19. Optical microsystem design and fabrication for medical image magnification
    C.G. Costa; J.M. Gomes; R.F. Wolffenbuttel; J.H. Correia;
    Microsystem Technologies,
    Volume 22, Issue 7, pp. 1747-1755, 2016.

  20. NBI Optical Filters in Minimally Invasive Medical Devices
    M.F. Silva; J.A. Rodrigues; M. Ghaderi; L.M. Goncalves; G. de Graaf; R.F. Wolffenbuttel; J.H. Correia;
    IEEE Journal of Selected Topics in Quantum Electronics,
    Volume 22, Issue 4, pp. 1-7, 2016.

  21. Fabrication of Ultrathin Large-area Dielectric Membrane Stacks for use as Interference Filters
    M. Ghaderi; G. de Graaf; R.F. Wolffenbuttel;
    In Procedia Engineering (Proceedings of the 30th Eurosensors Conference), vol. 168,
    Elsevier, pp. 1342-1345, 2016.

  22. Implementation of CMOS-compatible Metamaterial Absorber for gas Sensing Application
    E. Karimi Shahmarvandi; M. Ghaderi; P. Ayerden; G. de Graaf; R.F. Wolffenbuttel;
    In Procedia Engineering (Proceedings of the 30th Eurosensors Conference), vol. 168,
    Elsevier, pp. 1241-1244, 2016.

  23. Optical Spectroscopy for Biofuel Composition Sensing
    L.M. Middelburg; G. de Graaf; M. Ghaderi; A. Bossche; J.H. Bastemeijer; J.H. Visser; R.F. Wolffenbuttel;
    In Procedia Engineering (Proceedings of the 30th Eurosensors Conference), vol. 168,
    Elsevier, pp. 55-58, 2016.

  24. CMOS-compatible metamaterial-based wideband mid-infrared absorber for microspectrometer applications
    Karimi Shahmarvandi, Ehsan; Ghaderi, Mohammadamir; Ayerden, N. Pelin; de Graaf, Ger; Wolffenbuttel, Reinoud F.;
    In Proceedings of SPIE Photonics Europe, vol. 9883,
    SPIE, pp. 988309-988309-9, 2016.

  25. Design and fabrication of 45° inclined mirrors for wafer-level optical absorption spectroscopy
    N.P. Ayerden; M. Ghaderi; R.F. Wolffenbuttel;
    In Journal of Physics: Conference Series (Proceedings of the 27th Micromechanics and Microsystems Europe Workshop), vol. 757,
    IOP Publishing, pp. 012018, 2016.

  26. Analysis of the effect of stress-induced waviness in airgap-based optical filters
    M. Ghaderi; E.K. Shahmarvandi; G. de Graaf; R.F. Wolffenbuttel;
    In Proceedings of SPIE Photonics Europe, vol. 9889,
    SPIE, pp. 98890A-98890A, 2016.

  27. Design and fabrication of ripple-free CMOS-compatible stacked membranes for airgap optical filters for UV-visible spectrum
    M. Ghaderi; G. de Graaf; R.F. Wolffenbuttel;
    In Proceedings of SPIE Photonics Europe, vol. 9888,
    SPIE, pp. 98880R-98880R-8, 2016.

  28. Design and fabrication of ultrathin silicon-nitride membranes for use in UV-visible airgap-based MEMS optical filters
    M. Ghaderi; R.F. Wolffenbuttel;
    In Journal of Physics: Conference Series (Proceedings of the 27th Micromechanics and Microsystems Europe Workshop), vol. 757,
    IOP Publishing, pp. 012032, 2016.

  29. A highly miniaturized NDIR methane sensor
    N.P. Ayerden; G. de Graaf; P. Enoksson; R.F. Wolffenbuttel;
    In Proceedings of SPIE Photonics Europe, vol. 9888,
    SPIE, pp. 98880D-98880D, 2016.

  30. CMOS-compatible fabrication of metamaterial-based absorbers for the mid-IR spectral range
    E.K. Shahmarvandi; M. Ghaderi; R.F. Wolffenbuttel;
    In Journal of Physics: Conference Series (Proceedings of the 27th Micromechanics and Microsystems Europe Workshop), vol. 757,
    IOP Publishing, pp. 012033, 2016.

  31. Minimizing stress in large-area surface micromachined perforated membranes with slits
    M. Ghaderi; N.P. Ayerden; G. de Graaf; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 25, Issue 7, pp. 1-9, 2015.

  32. Active guarding of a four-point impedance probe with one common guard electrode for maximum readout bandwidth
    R.F. Wolffenbuttel; G. de Graaf;
    In P Daponte; S Shirmohammadi; {van Moer}, W (Ed.), IEEE International Instrumentation and Measurement Technology Conference (I2MTC) Proceedings,
    IEEE, pp. 2101-2105, 2015.

  33. Dielectric spectroscopy for measuring the composition of gasoline/water/ethanol mixtures
    G. de Graaf; G. Lacerenza; R.F. Wolffenbuttel; J. Visser;
    In P Daponte; S Shirmohammadi; {van Moer}, W (Ed.), IEEE International Instrumentation and Measurement Technology Conference (I2MTC) Proceedings,
    IEEE, pp. 154-158, 2015.

  34. Design and fabrication of an endomicroscopic imaging module for minimally invasive medical devices
    C.G. Costa; J.S. Gomes; R.F. Wolffenbuttel; J.H.G. Correia;
    In R Brama; JL Sánchez-Rojas (Ed.), Proceedings of SPIE Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, vol. 9517,
    SPIE, pp. 95170L-1-9517, 2015.

  35. A miniaturized optical sensor with integrated gas cell
    N.P. Ayerden; M. Ghaderi; G. de Graaf; R.F. Wolffenbuttel;
    In G Urban; J Wöllenstein; J Kieninger (Ed.), Procedia Engineering (Proceedings of the 29th Eurosensors Conference), vol. 120,
    Elsevier, pp. 392-395, 2015.

  36. The next generation of MEMS-based optical microspectrometers
    R.F. Wolffenbuttel;
    In R Brama; JL Sánchez-Rojas (Ed.), Proceedings of SPIE Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, vol. 9517,
    pp. 95170I-1-9517, 2015.

  37. Flow compensation in a MEMS dual-thermal conductivity detector for hydrogen sensing in natural gas
    G. de Graaf; A. Abarca Prouza; R.F. Wolffenbuttel;
    In TW Kenny; VM Bright (Ed.), Proceedings of the 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS),
    IEEE, pp. 1203-1206, 2015.

  38. Imaging amplification for minimally invasive medical devices
    J.H. Correia; J.M. Gomes; G.C. Costa; R.F. Wolffenbuttel; J.P. Carmo;
    In M Paranjape; MA Pavanello (Ed.), Proceedings of the 30th Symposium on Microelectronics Technology and Devices (SBMicro),
    IEEE, pp. 1-4, 2015.

  39. Vapour HF release of airgap-based UV-visible optical filters
    M. Ghaderi; N.P. Ayerden; G. de Graaf; R.F. Wolffenbuttel;
    In G Urban; J Wöllenstein; J Kieninger (Ed.), Procedia Engineering (Proceedings of the 29th Eurosensors Conference), vol. 120,
    Elsevier, pp. 816-819, 2015.

  40. Optical characterization of MEMS-based multiple air-dielectric blue-spectrum distributed bragg reflectors
    M. Ghaderi; N.P. Ayerden; G. de Graaf; R.F. Wolffenbuttel;
    In R Brama; JL Sánchez-Rojas (Ed.), Proceedings of SPIE Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, vol. 9517,
    SPIE, pp. 95171M-1-9517, 2015.

  41. Optical design and characterization of a gas filled MEMS Fabry-Perot filter
    N.P. Ayerden; M. Ghaderi; G. de Graaf; R.F. Wolffenbuttel;
    In JL Sanchez-Rojas; R Brama (Ed.), Proceedings of SPIE Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, vol. 9517,
    SPIE, pp. 95171N-95171N-8, 2015.

  42. A MEMS flow compensated thermal conductivity detector for gas sensing
    G. de Graaf; A. Abarca; M. Ghaderi; R.F. Wolffenbuttel;
    In J Wollenstein (Ed.), Procedia Engineering (Proceedings of the 29th Eurosensors Conference), vol. 120,
    Elsevier, pp. 1265-1268, 2015.

  43. NIR micro beam-splitter by saw-dicing of glass substrate for optical coherence tomography
    M.J. Maciel; C.G. Costa; A.C. Peixoto; R.F. Wolffenbuttel;
    In G Urban; J Wöllenstein; J Kieninger (Ed.), Procedia Engineering (Proceedings of the 29th Eurosensors Conference), vol. 120,
    Elsevier, pp. 807-810, 2015.

  44. Optomechanical characterization of annealed thin PECVD oxide membranes
    M. Ghaderi; G. de Graaf; R.F. Wolffenbuttel;
    In RJ Wiegerink; D Tsoukalas; U. Staufer (Ed.), Proceedings of the 26th Micromechanics and Microsystems Europe workshop,
    2015.

  45. Design and wafer-level fabrication of a micro beam splitter for application in optical coherence tomography
    M.J. Maciel; M.F. Silva; A.C. Peixoto; G.C. Costa; R.F. Wolffenbuttel; J.H. Correia;
    In RJ Wiegerink; D Tsoukalas; U. Staufer (Ed.), Proceedings of the 26th Micromechanics and Microsystems Europe workshop,
    2015.

  46. Design, fabrication and characterization of infrared LVOFs for measuring gas composition
    M. Ghaderi; N.P. Ayerden; A. Emadi; P. Enoksson; J.H. Correia; G. de Graaf; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 24, Issue 8, pp. 1-8, 2014.

  47. Gas viscosity sensing based on the electrostatic pull-in time of microactuators
    R.A. Dias; G. de Graaf; R.F. Wolffenbuttel; L.A. Machado da Rocha;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 216, pp. 376-385, 2014.

  48. Design, fabrication and characterization of LVOF-based IR microspectrometers
    N.P. Ayerden; M. Ghaderi; M.F. Silva; A. Emadi; P. Enoksson; J.H. Correia; G. de Graaf; R.F. Wolffenbuttel;
    In H Thienpont; J Mohr; H Zappe; H Nakajima (Ed.), Proceedings of SPIE Photonics Europe, vol. 9130,
    SPIE, pp. 91300T-91300T-1, 2014.

  49. Design and fabrication of multiple airgap-based visible filters
    M. Ghaderi; R.F. Wolffenbuttel;
    In H Thienpont; J Mohr; H Zappe; H Nakajima (Ed.), Proceedings of SPIE Photonics Europe, vol. 9130,
    SPIE, pp. 913005-913005-8, 2014.

  50. A blue optical filter for narrow-band imaging in endoscopic capsules
    M.F. Silva; M. Ghaderi; Luis Miguel Goncalves; G. de Graaf; R.F. Wolffenbuttel; J.H.G. Correia;
    In J Popp; VV Tuchin; DL. Matthews; FS Pavone (Ed.), Proceedings of SPIE Photonics Europe, vol. 9129,
    SPIE, pp. 912915-912915-8, 2014.

  51. A Lossy Fabry-perot Based Optical Filter for Natural Gas Analysis
    Ayerden, NP; Ghaderi, M; De Graaf, G; Wolffenbuttel, RF;
    In Procedia Engineering (Proceedings of the 28th Eurosensors Conference), vol. 87,
    Elsevier, pp. 1410-1413, 2014.

  52. Surface-micromachined bragg reflectors based on multiple airgap/sio2 layers for cmos-compatible fabry-perot filters in the uv-visible spectral range
    Ghaderi, M; Ayerden, NP; De Graaf, G; Wolffenbuttel, RF;
    In Procedia Engineering (Proceedings of the 28th Eurosensors Conference), vol. 87,
    Elsevier, pp. 1533-1536, 2014.

  53. Optical filter for providing the required illumination to enable narrow band imaging
    M.F. Silva; J.A. Rodrigues; M.J. Oliveira; A.R. Fernandes; S. Pereira; C.G. Costa; M. Ghaderi; P. Ayerden; L.M. Goncalves; G. de Graaf; R.F. Wolffenbuttel; J.H. Correia;
    In Procedia Engineering (Proceedings of the 28th Eurosensors Conference), vol. 87,
    Elsevier, pp. 1414-1417, 2014.

  54. Gas viscosity MEMS sensor based on pull-in
    R.A. Dias; G. de Graaf; R.F. Wolffenbuttel; L.A. Machado da Rocha;
    In JR Morante (Ed.), Proceedings of Transducers Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS EUROSENSORS XXVII),
    IEEE, pp. 980-983, 2013.

  55. A review of visible-range Fabry-Perot microspectrometers in silicon for the industry
    Carmo Paulo Joao; R.P. Rocha; M. Bartek; G. de Graaf; R.F. Wolffenbuttel; J.H. Correia;
    Optics & Laser Technology,
    Volume 44, Issue 7, pp. 2312-2320, 2012.

  56. Linear variable optical filter-based ultraviolet microspectrometer
    Emadi, Arvin; Wu, Huaiwen; de Graaf, Ger; Enoksson, Peter; Correia, Jose Higino; Wolffenbuttel, Reinoud;
    Applied optics,
    Volume 51, Issue 19, pp. 4308-4315, 2012.

  57. Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter
    Emadi, Arvin; Wu, Huaiwen; de Graaf, Ger; Wolffenbuttel, Reinoud;
    Optics Express,
    Volume 20, Issue 1, pp. 489-507, 2012.

  58. Lock-in amplifier techniques for low-frequency modulated sensor applications
    G. de Graaf; R.F. Wolffenbuttel;
    In G Brasseur (Ed.), IEEE International Instrumentation and Measurement Technology Conference Proceedings,
    IEEE, pp. 1745-1749, 2012.

  59. Closed-loop operated time-based accelerometer
    R.A. Dias; P.J. Macedo; H.D. Silva; R.F. Wolffenbuttel; E. Cretu; L.A. Machado da Rocha;
    In R Walczak; J Dzuiban (Ed.), 26th European Conference on Solid-State Transducers, EUROSENSORS 2012,
    Elsevier, pp. 398-401, 2012.

  60. Surface-micromachined thermal conductivity detectors for gas sensing
    G. de Graaf; R.F. Wolffenbuttel;
    In G Brasseur (Ed.), IEEE International Instrumentation and Measurement Technology Conference Proceedings,
    IEEE, pp. 1861-1864, 2012.

  61. Design, fabrication and measurements with a UV linear-variable optical filter microspectrometer
    Emadi, Arvin; Wu, Huaiwen; de Graaf, Ger; Enoksson, Peter; Correia, Jos{\'e} Higino; Wolffenbuttel, Reinoud;
    In Proceedings of SPIE Photonics Europe, vol. 8439,
    SPIE, pp. 84390V-84390V, 2012.

  62. Closed loop operation of time-based accelerometers
    Dias, Rosana A; Wolffenbuttel, RF; Cretu, E; Rocha, Lu{\'\i}s A;
    In Proceedings of the 23rd Micromechanics and Microsystems Europe Workshop,
    2012.

  63. Comparing silicon deposition techniques for visible-blind detector fabrication
    Emadi, A; Enoksson, Peter; Correia, JH; Wolffenbuttel, RF;
    In Proceedings of the 23rd Micromechanics and Microsystems Europe Workshop,
    2012.

  64. Design and implementation of IR microspectrometers based on linear-variable optical filters
    Emadi, Arvin; Wu, Huaiwen; de Graaf, Ger; Wolffenbuttel, Reinoud;
    In Proceedings of SPIE Photonics Europe, vol. 8439,
    SPIE, pp. 84391O-84391O, 2012.

  65. Design, fabrication and measurements with a UV linear-variable optical filter microspectrometer
    Emadi, Arvin; Wu, Huaiwen; de Graaf, Ger; Enoksson, Peter; Correia, Jos{\'e} Higino; Wolffenbuttel, Reinoud;
    In Proceedings of SPIE Photonics Europe, vol. 8439,
    SPIE, pp. 84390V-84390V, 2012.

  66. Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage
    L.A. Machado da Rocha; R.A. Dias; E. Cretu; L. Mol; R.F. Wolffenbuttel;
    Microsystem Technologies: micro and nanosystems - information storage and processing systems,
    Volume 17, Issue 3, pp. 429-436, 2011.

  67. Narrow-band pass filter array for integrated opto-electronic spectroscopy detectors to assess esophageal tissue
    D. Ferreira; J. Mirkovic; R.F. Wolffenbuttel; J. Correia; M. Feld; G. Minas;
    Biomedical Optics Express,
    Volume 2, Issue 6, pp. 1703-1716, 2011.

  68. A surface micromachined thermopile detector array with an interference-based absorber
    H.W. Wu; A. Emadi; P.M. Sarro; G. de Graaf; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 21, Issue 7, pp. 1-8, 2011.

  69. Design of a time-based micro-g accelerometer
    R.A. Dias; L. Mol; R.F. Wolffenbuttel; E. Cretu; L.A. Machado da Rocha;
    IEEE Sensors Journal,
    Volume 11, Issue 8, pp. 1677-1683, 2011.

  70. Pull-in-based $\mu$g-resolution accelerometer: Characterization and noise analysis
    Dias, Rosana A; Cretu, Edmond; Wolffenbuttel, Reinoud; Rocha, Luis A;
    Sensors and Actuators A: Physical,
    Volume 172, Issue 1, pp. 47-53, 2011.

  71. Digitally-controlled array of solid-state microcoolers for use in surgery
    Carmo, JP; Silva, MF; Ribeiro, JF; Wolffenbuttel, RF; Alpuim, P; Rocha, JG; Goncalves, LM; Correia, JH;
    Microsystem Technologies,
    Volume 17, Issue 8, pp. 1283-1291, 2011.

  72. Noise analysis of a micro-G pull-in time accelerometer
    R.A. Dias; R.F. Wolffenbuttel; E. Cretu; L.A. Rocha;
    In A Johanessen; P Ohlckers; E Johanessen; M Azadmehr (Ed.), Vestfold University College, pp. 258-261, 2011.

  73. Squeeze-film damper design with air channels: experimental verification
    R.A. Dias; R.F. Wolffenbuttel; E. Cretu; L. Rocha;
    In G Kaltsas; C Tsamis (Ed.), 25th Eurosensors Conference,
    Elsevier, pp. 47-50, 2011.

  74. Sensor platform for natural gas composition measurement
    G. de Graaf; F. Bakker; R.F. Wolffenbuttel;
    In G Kaltsas; C Tsamis (Ed.), 25th Eurosensors Conference,
    Elsevier, pp. 1157-1160, 2011.

  75. Use of multi-wall carbon nanotubes as an absorber in a thermal detector
    H. Wu; S. Vollebregt; A. Emadi; G. de Graaf; R. Ishihara; R.F. Wolffenbuttel;
    In C Tsamis; G Kaltas (Ed.), 25th Eurosensors Conference,
    Elsevier, pp. 523-526, 2011.

  76. A model for static and dynamic thermal analysis of thin film MEMS structures including the thermal conductivity of the surrounding gas
    G. de Graaf; H.W. Wu; R.F. Wolffenbuttel;
    In {De Saint Leger et al}, O (Ed.), 12th Intl. Conf. on Thermal, Mechanical Multi-Physics Simulation and Experiments in Microelectronics and Microsystems,
    IEEE, pp. 1/5-5/5, 2011.

  77. IR microspectrometers based on linear-variable optical filters
    A. Emadi; H.W. Wu; G. de Graaf; R.F. Wolffenbuttel;
    In G Kaltsas; C Tsamis (Ed.), 25th Eurosensors Conference,
    Elsevier, pp. 1401-1404, 2011.

  78. Design and fabrication of an Albedo insensitive analog sun sensor
    H.W. Wu; A. Emadi; G. de Graaf; J. Leijtens; R.F. Wolffenbuttel;
    In G Kaltsas; C Tsamis (Ed.), 25th Eurosensors Conference,
    Elsevier, pp. 527-530, 2011.

  79. Fabrication and characterization of IC compatible linear variable optical filters with application in a micro spectrometer
    A. Emadi; H.W. Wu; S. Grabarnik; G. de Graaf; K. Hedsten; P. Enoksson; J.H.G. Correia; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 162, Issue 2, pp. 400-405, 2010.

  80. MCM based microlaboratory for simultaneous measurement of several biochemical parameters by spectrophotometry
    G. Minas; R.F. Wolffenbuttel; J.H.G. Correia;
    Biomedical Microdevices,
    Volume 12, Issue 4, pp. 727-736, 2010.

  81. A planar thermoelectric power generator for integration in wearable microsystems
    Carmo Paulo Joao; Luis Miguel Goncalves; R.F. Wolffenbuttel; J.H.G. Correia;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 161, Issue 1-2, pp. 199-204, 2010.

  82. Surface micromached gas sensor using thermopiles for carbon dioxide detection
    S. Chen; H.W. Wu; G. de Graaf; R.F. Wolffenbuttel;
    {van Honschoten}, J; H Verputten; H Groenland (Ed.);
    MME, , pp. 216-219, 2010.

  83. Spectral measurement using IC compatible linear variable optical filter
    A. Emadi; H. Wu; S. Grabarnik; G. de Graaf; K. Hedsten; P. Enoksson; J.H.G. Correia; R.F. Wolffenbuttel;
    H Thienpont; {van Daele}, P; J Mohr; H Zappe (Ed.);
    SPIE, , pp. 1-6, 2010.

  84. Thermal analysis, fabrication and signal processing of surface microma-chined thermal conductivity based gas sensors
    G. de Graaf; H. Wu; R.F. Wolffenbuttel;
    L Abelmann; H Groenland; {van Honschoten}, J; H Verputten (Ed.);
    MME, , pp. 173-176, 2010.

  85. An UV linear variable optical filter based micro spectrometer
    A. Emadi; H. Wu; S. Grabarnik; G. de Graaf; K. Hedsten; P. Enoksson; J.H.G. Correia; R.F. Wolffenbuttel;
    M.J. Vellekoop (Ed.);
    Eurosensor 24, , pp. 416-419, 2010.

  86. A CMOS 128 APS linear array integrated with a LVOF for high sensitivity and high resolution micro spectrophotometry
    C. Liu; A. Emadi; H.W. Wu; G. de Graaf; R.F. Wolffenbuttel;
    F Berghmans; AG Mignani; C. van HoofA (Ed.);
    SPIE, , pp. 1-10, 2010.

  87. Encapsulated thermopile detector array for IR microspectrometer
    H. Wu; A. Emadi; G. de Graaf; R.F. Wolffenbuttel;
    MA Druy; CD Brown; RA Crocombe (Ed.);
    SPIE, , pp. 1-9, 2010.

  88. CMOS compatible LVOF based visible microspectrometer
    A. Emadi; H. Wu; S. Grabarnik; G. de Graaf; R.F. Wolffenbuttel;
    MA Druy; CD Brown; RA Crocombe (Ed.);
    SPIE, , pp. 1-8, 2010.

  89. Spectral measurement with a linear variable filter using a LMS algorithm
    A. Emadi; S. Grabarnik; H. Wu; G. de Graaf; R.F. Wolffenbuttel;
    MJ vellekoop (Ed.);
    Eurosensor 24, , pp. 504-507, 2010.

  90. Post processing of linear variable optical filter on CMOS chip at die-level
    A. Emadi; H. Wu; G. de Graaf; R.F. Wolffenbuttel;
    {van Honschoten}, J; H Verputten; H Groenland (Ed.);
    MME, , pp. 185-188, 2010.

  91. Thin film encapsulated 1D thermoelectric detector in an IR microspectrometer
    H. Wu; A. Emadi; G. de Graaf; R.F. Wolffenbuttel;
    F Berghmans; AG Mignani; C. van HoofA (Ed.);
    SPIE, , pp. 1-8, 2010.

  92. Time based micro-g accelerometer with improved damper geometry
    R.A. Dias; L.A. Rocha; L. Mol; R.F. Wolffenbuttel; E. Cretu;
    V Piuri (Ed.);
    IEEE, , pp. 672-675, 2010.

  93. Interference filter based absorber for thermopile detector array by surface micromachining
    H. Wu; A. Emadi; G. de Graaf; R.F. Wolffenbuttel;
    L Abelmann; H Groenland; {van Honschoten}, J; H Verputten (Ed.);
    MME, , pp. 169-172, 2010.

  94. Linear variable optical filter with silver metallic layers
    A. Emadi; S. Mokkapati; H. Wu; G. de Graaf; R.F. Wolffenbuttel;
    {van Honschoten}, J; H Verputten; H Groenland (Ed.);
    MME, , pp. 104-107, 2010.

  95. Fast step-response settling of micro electrostatic actuators operated at low air pressure using input shaping
    L. Mol; L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 19, pp. 074020(1)-0740, 2009.

  96. Characterization of thermal cross-talk in a MEMS-based thermopile detector array
    H.W. Wu; S. Grabarnik; A. Emadi; G. de Graaf; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 19, pp. 74022(1)-74022, 2009.

  97. Vertically tapered layers for optical applications fabricated using resist reflow
    A. Emadi; H.W. Wu; S. Grabarnik; G. de Graaf; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 19, pp. 074014(1)-0740, 2009.

  98. Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
    L. Mol; L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 19, pp. 074021(1)-0740, 2009.

  99. Self-powered sun sensor microsystems
    H.W. Wu; A. Emadi; G. de Graaf; J. Leijtens; R.F. Wolffenbuttel;
    s.n. (Ed.);
    Eurosensors, , pp. 1-4, 2009.

  100. Microspectrometer with a concave grating fabricated in a MEMS technology
    S. Grabarnik; A. Emadi; H.W. Wu; G. de Graaf; R.F. Wolffenbuttel;
    s.n. (Ed.);
    Eurosensors, , pp. 1-4, 2009.

  101. IC-compatible fabrication of linear variable optical filters for micro-spectrometer
    A. Emadi; H.W. Wu; S. Grabarnik; G. de Graaf; R.F. Wolffenbuttel;
    s.n. (Ed.);
    Eurosensors, , pp. 1-4, 2009.

  102. Study of thermal cross-talk in micromachined thermopile based infrared detector arrays
    H.W. Wu; S. Grabarnik; A. Emadi; G. de Graaf; R.F. Wolffenbuttel;
    s.n. (Ed.);
    STW, , pp. 1-4, 2009.

  103. Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
    L. Mol; L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    s.n. (Ed.);
    Transducers, , pp. 1425-1428, 2009.

  104. Self-powered optical sensor systems
    H.W. Wu; A. Emadi; G. de Graaf; J. Leijtens; R.F. Wolffenbuttel;
    s.n. (Ed.);
    Transducers, , pp. 1373-1376, 2009.

  105. Improved damper geometry for parallel-plate MEMS
    R. dias; L. Mol; E. Cretu; R.F. Wolffenbuttel; L.A. Rocha;
    s.n. (Ed.);
    MME, , pp. 1-4, 2009.

  106. Interference filter based IR absorber for MEMS thermopile array
    A. Emadi; H.W. Wu; S. Grabarnik; G. de Graaf; R.F. Wolffenbuttel;
    s.n. (Ed.);
    MME, , pp. 1-4, 2009.

  107. Thermal cross-talk in IC-compatible micromachined infrared thermopile detector arrays
    H.W. Wu; S. Grabarnik; G. de Graaf; A. Emadi; R.F. Wolffenbuttel;
    s.n. (Ed.);
    IRS, , pp. 319-323, 2009.

  108. Fabrication and characterization of IC-compatible multilayer interference filters
    G. de Graaf; A. Emadi; R.F. Wolffenbuttel;
    s.n. (Ed.);
    IRS, , pp. 313-317, 2009.

  109. Optimal implementation of a microspectrometer based on a single flat diffraction grating
    S. Grabarnik; A. Emadi; E.A. Sokolova; G.V. Vdovin; R.F. Wolffenbuttel;
    Applied Optics,
    Volume 47, pp. 2082-2090, 2008.

  110. Read-out calibration of a SOI capacitive transducer using the pull-in voltage
    L. Mol; L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 18, Issue 6, 2008.

  111. Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph
    S. Grabarnik; A. Emadi; H.W. Wu; G. de Graaf; G.V. Vdovin; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 18, Issue 6, 2008.

  112. High-resolution microspectrometer with an aberration-correcting planar grating
    S. Grabarnik; A. Emadi; H.W. Wu; G. de Graaf; R.F. Wolffenbuttel;
    Applied Optics,
    Volume 47, pp. 6442-6447, 2008.

  113. A thermopile detector array with scaled TE elements for use in an integrated IR microspectrometer
    H.W. Wu; S. Grabarnik; A. Emadi; G. de Graaf; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 18, Issue 6, 2008.

  114. Planar MEMS-compatible microspectrograph
    S. Grabarnik; A. Emadi; H.W. Wu; G. de Graaf; G.V. Vdovin; R.F. Wolffenbuttel;
    s.n. (Ed.);
    apcot, , pp. 53-56, 2008.

  115. Design and fabrication of a thermopile detector array with scaled elements for an integrated IR microspectrometer
    H.W. Wu; A. Emadi; W. van der Vlist; S. Grabarnik; G. de Graaf; R.F. Wolffenbuttel;
    s.n. (Ed.);
    apcot, , pp. 213-216, 2008.

  116. Optical microspectrometer with planar grating and external spherical
    S. Grabarnik; A. Emadi; H.W. Wu; G. de Graaf; R.F. Wolffenbuttel;
    s.n. (Ed.);
    Eurosensors, , pp. 350-353, 2008.

  117. Fabrication of trapped optical structures using resist reflow
    A. Emadi; H.W. Wu; S. Grabarnik; G. de Graaf; R.F. Wolffenbuttel;
    s.n. (Ed.);
    MME, , pp. 113-116, 2008.

  118. Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
    L. Mol; L.A. Rocha; R.F. Wolffenbuttel;
    s.n. (Ed.);
    MME, , pp. 355-358, 2008.

  119. Optical sensors based on photon detection
    R.F. Wolffenbuttel;
    {G.C.M. Meijer} (Ed.);
    Wiley, , pp. 4-79-121, 2008.

  120. IC-compatible microspectrometer using a planar imaging diffraction grating
    S. Grabarnik; A. Emadi; H.W. Wu; G. de Graaf; G.V. Vdovin; R.F. Wolffenbuttel;
    s.n. (Ed.);
    SPIE, , pp. 1-10, 2008.

  121. Characterization of thermal cross-talk in a thermopile detector
    H.W. Wu; S. Grabarnik; G. de Graaf; A. Emadi; R.F. Wolffenbuttel;
    s.n. (Ed.);
    MME, , pp. 415-418, 2008.

  122. Simulation and analytical calculation of reflowed resist structures
    A. Emadi; H.W. Wu; S. Grabarnik; G. de Graaf; R.F. Wolffenbuttel;
    s.n. (Ed.);
    MME, , pp. 347-350, 2008.

  123. Optimized settling of under-damped electrostatic actuators based on input shaping
    L. Mol; L.A. Rocha; R.F. Wolffenbuttel;
    s.n. (Ed.);
    Eurosensors, , pp. 1337-1340, 2008.

  124. Damping of electrostatic actuators operated at low air pressure using input shaping
    L. Mol; L.A. Rocha; R.F. Wolffenbuttel;
    s.n. (Ed.);
    MME, , pp. 13-16, 2008.

  125. Cross-talk characterization of thermal detector array
    H.W. Wu; S. Grabarnik; A. Emadi; G. de Graaf; R.F. Wolffenbuttel;
    s.n. (Ed.);
    Eurosensors, , pp. 366-369, 2008.

  126. Concave diffraction gratings fabricated with planar lithography
    S. Grabarnik; A. Emadi; H.W. Wu; G. de Graaf; R.F. Wolffenbuttel;
    s.n. (Ed.);
    SPIE, , pp. 1-8, 2008.

  127. Planar double-grating micro spectrometer
    S. Grabarnik; R.F. Wolffenbuttel; A. Emadi; M. Loktev; E.A. Sokolova; G.V. Vdovin;
    Optics Express,
    Volume 15, Issue 6, pp. 3581-3588, 2007.

  128. Poly-elektronics zakboek
    P.P.L. Regtien; R.F. Wolffenbuttel;
    Reed Business, , 2007.

  129. Accurate read-out calibration of an SOI capacitive transducer using the pull-in voltage
    L. Mol; L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    s.n. (Ed.);
    MME, , pp. 355-358, 2007.

  130. A test mechanism for device diagnostics and process characterization
    L.A. Rocha; L. Mol; E. Cretu; R.F. Wolffenbuttel; J. Machado da silva; J.S. matos;
    s.n. (Ed.);
    s.n., , pp. 597-602, 2007.

  131. Infrared thermopile detector array for the integrated micro spectrometer
    A. Emadi; H.W. Wu; S. Grabarnik; G. de Graaf; R.F. Wolffenbuttel;
    s.n. (Ed.);
    IEEE, , pp. 435-438, 2007.

  132. Full-gap positioning of parallel-plate electrostatic MEMS using on-off control
    L. Mol; L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    s.n. (Ed.);
    IEEE, , pp. 1464-1468, 2007.

  133. Hoofdstuk E: Meten
    P.P.L. Regtien; R.F. Wolffenbuttel;
    {H.S. van Leerdam, R.P. Mertens}; {A.J.M. Montagne en G.A. Schwippert} (Ed.);
    Reed Business, , pp. E/1-E/66, 2007.

  134. Hoofdstuk B4: Sensoren en Actuatoren (U_SP_2_I_IC_T)
    P.P.L. Regtien; R.F. Wolffenbuttel;
    {H.S. van leerdam, R.P. Mertens}; {A.J.M. Montagne en G.A. Schwippert} (Ed.);
    Reed Business, , pp. B4/1-B4/72, 2007.

  135. Design and fabrication of an infrared microspectrometer using attenuated total reflection
    G. de Graaf; W. van der Vlist; R.F. Wolffenbuttel;
    s.n. (Ed.);
    IEEE, , pp. 1395-1399, 2007.

  136. Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics
    L.A. Rocha; L. Mol; E. Cretu; R.F. Wolffenbuttel; J. Machado da silva;
    s.n. (Ed.);
    s.n., , pp. 171-175, 2007.

  137. Spectral sensor basedon an imaging diffraction grating and fabricated with MEMS technologies
    S. Grabarnik; A. Emadi; H.W. Wu; G. de Graaf; G.V. Vdovin; R.F. Wolffenbuttel;
    s.n. (Ed.);
    MME, , pp. 175-178, 2007.

  138. Design and fabrication of thermopile detector array for microspectrometer application
    H.W. Wu; A. Emadi; G. de Graaf; S. Grabarnik; R.F. Wolffenbuttel;
    s.n. (Ed.);
    MME, , pp. 103-106, 2007.

  139. Fabrication and characterization of infra-red multi-layered interference filter
    A. Emadi; S. Grabarnik; H.W. Wu; G. de Graaf; R.F. Wolffenbuttel;
    MME, , pp. 249-252, 2007.

  140. A feedback operated tunable accelerometer: Analysis and design
    L.A. Rocha; L. Mol; E. Cretu; R.F. Wolffenbuttel;
    s.n. (Ed.);
    MME, , pp. 405-408, 2007.

  141. lab-on-a-chip for biological fluid analysis by spectrophotometry (U-SP-2-I-ICT)
    R.F. Wolffenbuttel; G. Minas; J.H.G. Correia;
    Arab Health World,
    Volume XX, Issue 3, pp. 17-18, 2006.

  142. UV bandpass optical filters for microspectrometers (U-SP-2-I-ICT)
    A. Emadi; R.F. Wolffenbuttel; J.H.G. Correia;
    ECS Transactions,
    Volume 4, Issue 1, pp. 141-147, 2006.

  143. Using dynamic voltage drive in a parallel-plate electrostatic actuator for full-gap travel range and positioning (U-SP-2-I-ICT)
    R.F. Wolffenbuttel; L.A. Rocha; E. Cretu;
    IEEE Journal of Microelectromechanical Systems,
    Volume 15, Issue 1, pp. 69-83, 2006.

  144. An array of highly selective Fabry-perot optical channels for biological fluid analysis by optical absorption using a white light source for illumination (U-SP-2-I-ICT)
    R.F. Wolffenbuttel; G. Minas; J.H.G. Correia;
    Journal of Optics,
    Volume 8, pp. 272-278, 2006.

  145. An MCM based microsystem for calorimetric detection of niomolecules in biological fluids (U-SP-2-I-ICT)
    G. de Graaf; R.F. Wolffenbuttel; G. Minas; J.H.G. Correia;
    IEEE Sensors Journal,
    Volume 6, Issue 4, pp. 1003-1009, 2006.

  146. Systematic approach for the linearization and readout of non-symmetric impedance bridges (U-SP-2-I-ICT)
    R.F. Wolffenbuttel; G. de Graaf;
    IEEE Transactions on Instrumentation and Measurement,
    Volume 55, Issue 5, pp. 1566-1572, 2006.

  147. Silicon compatible Fabry-perot optical filters for mid-IR microspectrometer applications (U-SP-2-I-ICT)
    A. Emadi; G. de Graaf; R.F. Wolffenbuttel; J.H.G. Correia;
    s.n. (Ed.);
    Eurosensors, , pp. 1-4, 2006.

  148. Experimental verification of Rarefied Gas Squeezed-Film Damping Models used in MEMS (U-SP-2-I-ICT)
    L. Mol; R.F. Wolffenbuttel; L.A. Rocha; E. Cretu;
    s.n. (Ed.);
    s.l., , pp. 1-4, 2006.

  149. Fabrication of an in Infrared microspectrometer using evanescent wave sensing (U-SP-2-I-ICT)
    G. de Graaf; R.F. Wolffenbuttel;
    s.n. (Ed.);
    Eurosensors, , pp. 1-4, 2006.

  150. Rarefied gas squeezed-film damping measurements at constant knudsen numbers (U-SP-2-I-ICT)
    L. Mol; R.F. Wolffenbuttel; L.A. Rocha; E. Cretu;
    s.n. (Ed.);
    Eurosensors, , pp. 1-4, 2006.

  151. Squeezed-film damping measurements at constant knudsen numbers (U-SP-2-I-ICT)
    L. Mol; R.F. Wolffenbuttel; L.A. Rocha; E. Cretu;
    R.F. Wolffenbuttel (Ed.);
    s.l., , pp. 121-124, 2006.

  152. On-off control for full-gap positioning of parallel-plate electrostatic MEMS (U-SP-2-I-ICT)
    L. Mol; R.F. Wolffenbuttel; L.A. Rocha; E. Cretu;
    s.n. (Ed.);
    s.l., , pp. 1-4, 2006.

  153. Pull-In Time Based High Sensitivity Accelermeter With Adjustable Rane and Resolution (U-SP-2-I-ICT)
    L. Mol; R.F. Wolffenbuttel; L.A. Rocha; E. Cretu;
    R.F. Wolffenbuttel (Ed.);
    MME, , pp. 129-132, 2006.

  154. Pre-distorted sinewave-driven parallel-plate electrostatic actuator for harmonic displacement
    G. de Graaf; L. Mol; L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 15, pp. 103-108, 2005.

  155. Thermo-electric characterization of APCVD PolySi/sub 0.7/Ge/sub 0.3/ for IC-compatible fabrication of integrated lateral Peltier elements
    D.D.L. Wijngaards; R.F. Wolffenbuttel;
    IEEE Transactions on Electron Devices,
    Volume 52, Issue 5, pp. 1014-1025, 2005.

  156. Measuring and interpreting the mechanical-thermal noise spectrum in a MEMS
    L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 15, pp. 30-38, 2005.

  157. A lab-on-a-chip for spectrophotometric analysis of biological fluids
    G. Minas; R.F. Wolffenbuttel; J.H. Correia;
    Lab On a Chip: microfluidic and nanotechnologies for chemistry, biology, and bioengineering,
    Volume 5, Issue 11, pp. 1303-1309, 2005.

  158. MEMS-based mechanical spectrum analyzer
    L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    IEEE Transactions on Instrumentation and Measurement,
    Volume 54, Issue 3, pp. 1260-1265, 2005.

  159. MEMS-based optical mini- and microspectrometers for the visible and infrared spectral range
    R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 15, pp. 145-152, 2005.

  160. A SU-8 fluidic microsystem for biological fluids analysis
    D.J. Ribeiro; G. Minas; P.B. Turmezei; R.F. Wolffenbuttel; J.H. Correia;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 123-124, pp. 77-81, 2005.

  161. Spectral performance of a micromachined infrared spectrum analyzer in silicon
    S.H. Kong; R.F. Wolffenbuttel;
    IEEE Transactions on Instrumentation and Measurement,
    Volume 54, Issue 1, pp. 264-267, 2005.

  162. Study of ic compatible on-chip thermoelectric coolers
    S.H. Kong; D.D.L. Wijngaards; R.F. Wolffenbuttel;
    Japanese Journal of Applied Physics. Part 2, Letters & Express Lettres,
    Volume 44, Issue 7B, pp. 5736-5739, 2005.

  163. Experimental verification of squeezed-film damping models for MEMS
    L.A. Rocha; L. Mol; E. Cretu; R.F. Wolffenbuttel;
    s.n. (Ed.);
    s.n., , pp. 244-247, 2005. Editor onbekend JH.

  164. Design of an infrared microspectrometer using total internal reflection
    G. de Graaf; R.F. Wolffenbuttel;
    s.n. (Ed.);
    s.n., , pp. 1-4, 2005. Editor onbekend JH.

  165. Full-range dynamic positioning of parallel-plate electrostatic actuators
    L. Mol; L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    s.n. (Ed.);
    s.n., , pp. 280-283, 2005. Editor onbekend JH.

  166. Full-range stable operation of parallel-plate electrostatic actuators
    L.A. Rocha; L. Mol; E. Cretu; R.F. Wolffenbuttel;
    {R Reus}, de; {S Bouwstra} (Ed.);
    IEEE, , pp. 1-4, 2005. Editor onbekend.

  167. High-resolution capacitive measurement of microstructure displacement using coherent detection
    L. Mol; G. de Graaf; L.A. Rocha; R.F. Wolffenbuttel;
    {R Reus}, de; {S Bouwstra} (Ed.);
    IEEE, , pp. 1-4, 2005. Editor onbekend.

  168. 3-D modeling and simulation of fluidic microsystems for biological fluids analysis
    G. Minas; MH.J.M. Barros; R.F. Wolffenbuttel; J.H. Correia;
    s.n. (Ed.);
    s.n., , pp. 342-345, 2005. Editor onbekend JH.

  169. On-chip integrated CMOS optical detection microsystem for spectrophotometric analyses in biological microfluidic systems
    G. Minas; D.J. Ribeiro; R.F. Wolffenbuttel; J.H. Correia;
    s.n. (Ed.);
    IEEE, , pp. 1133-1138, 2005. Editor onbekend JH.

  170. Method of performing an assay, apparatus therefor, and a method of manufacturing and apparatus
    V.P. Iordanov; P.M. Sarro; R.F. Wolffenbuttel; M.J. Vellekoop;
    2005. Technische Universiteit Delft - 25/75 ECTM/EI, sb; US2005059158; Technische Universiteit Delft - 25/75 ECTM/EI, sb.

  171. Illumination source identification using a CMOS optical microsystem
    G. de Graaf; R.F. Wolffenbuttel;
    IEEE Transactions on Instrumentation and Measurement,
    Volume 53, Issue 2, pp. 238-242, 2004. ed.is niet bekend.

  172. Analysis and analitycal modeling of static pull-in with application to MEMS-based voltage reference and process monitoring
    L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    IEEE Journal of Microelectromechanical Systems,
    Volume 13, Issue 2, pp. 342-354, 2004.

  173. Compensation of temperature effects on the pull-in voltage of microstructures
    L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 115, pp. 351-356, 2004.

  174. An array of Fabry-Perot optical-channels for biological fluids analysis
    G. Minas; J.C. Ribeiro; J.S. Martins; R.F. Wolffenbuttel; J.H. Correia;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 115, pp. 362-367, 2004. ed. is niet bekend.

  175. State-of-the-art in integrated optical microspectrometers
    R.F. Wolffenbuttel;
    IEEE Transactions on Instrumentation and Measurement,
    Volume 53, Issue 1, pp. 197-202, 2004. ed. is niet bekend.

  176. Single-chip micro-thermostat applying both active heating and active cooling
    D.D.L. Wijngaards; G. de Graaf; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 110, pp. 187-195, 2004. ed. is niet bekend.

  177. Optical CMOS sensor system for detection of light sources
    G. de Graaf; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 110, pp. 77-81, 2004. ed. is niet bekend.

  178. Comparison between bulk micromachined and CMOS X-ray detectors
    J.G. Rocha; C.G.J. Schabmueller; N.F. Ramos; S. Lanceros-Mendez; M.V. Moreira; A.G.R. Evans; R.F. Wolffenbuttel; J.H. Correia;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 115, pp. 215-220, 2004. ed. is niet bekend.

  179. Full characterisation of pull-in in single-sided clamped beams
    L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 110, pp. 301-309, 2004.

  180. CMOS X-rays detector array based on scintillating light guides
    J.G. Rocha; N.F. Ramos; S. Lanceros-Mendez; R.F. Wolffenbuttel; J.H. Correia;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 110, pp. 119-123, 2004. ed. is niet bekend.

  181. Biological microsystems for measuring uric acid in biological fluids
    G. Minas; J.S. Martins; J.C. Ribeiro; R.F. Wolffenbuttel; J.H. Correia;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 110, pp. 33-38, 2004. ed. is niet bekend.

  182. Behavioural analysis of the pull-in dynamic transition
    L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 14, pp. S37-S42, 2004.

  183. A full-system dynamic model for complex MEMS structures
    L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    Nano Science and Technology Institute, , pp. 203-206, 2004. ed. is niet bekend.

  184. A MCM-based microsystem for biological fluids analysis by optical absorption
    G. Minas; J.C. Ribeiro; G. de Graaf; R.F. Wolffenbuttel; J.H. Correia;
    s.n. (Ed.);
    IEEE, , pp. 223-226, 2004. niet eerder opgevoerd -sb.

  185. Analytical model for pull-in time low-Q MEMS devices
    L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    Nanoscience and Technology Intitute, , pp. 271-274, 2004. ed. is niet bekend.

  186. Quadrature oscillator with pre-distorted waveforms for application in MEMS-based mechanical spectrum analyser
    G. de Graaf; L. Mol; L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    M Steveart; CL Claeys (Ed.);
    IEEE, , pp. 407-410, 2004.

  187. Harmonic displacement of a parallel-plate electrostatic actuator using a pre-distorted sine wave oscillator
    G. de Graaf; L. Mol; L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    s.n., , pp. 53-56, 2004. ed. is niet bekend.

  188. Mechanical-thermal and 1/f noise in MEMS devices
    L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    s.n., , pp. 100-103, 2004. ed. is niet bekend.

  189. Pull-in dynamics; analysis and modeling of the transitional regime
    L.A. Rocha; E. Cretu; R.F. Wolffenbuttel;
    IEEE, , pp. 249-252, 2004. ed. is niet bekend.

  190. A systematic approach for sensor bridge linearisation and readout
    G. de Graaf; R.F. Wolffenbuttel;
    S Demidenko; R Ottoboni; D Petri; V Piuri; {Chong Tad Weng}, D (Ed.);
    IEEE, , pp. 1551-1555, 2004.

  191. Circuit for readout and linearisation of sensor bridges
    G. de Graaf; R.F. Wolffenbuttel;
    M Steveart; CL Claeys (Ed.);
    IEEE, , pp. 151-154, 2004.

  192. A SU-8 fluidic microsystem for biological fluids analysis
    J.C. Ribeiro; G. Minas; P.B. Turmezei; R.F. Wolffenbuttel; J.H. Correia;
    s.n. (Ed.);
    Eurosensors, , pp. 1-4, 2004. Nog niet eerder opgevoerd JH.

  193. Study on temperature stability improvement of on-chip reference elements using integrated Peltier coolers
    D.D.L. Wijngaards; R.F. Wolffenbuttel;
    IEEE Transactions on Instrumentation and Measurement,
    Volume 52, Issue 2, pp. 478-482, 2003.

  194. Stability of a micromechanical pull-in voltage reference
    L.A. Machado da Rocha; E. Cretu; R.F. Wolffenbuttel;
    IEEE Transactions on Instrumentation and Measurement,
    Volume 52, Issue 2, pp. 457-460, 2003.

  195. X-ray detector based on a bulk micromachined photodiode combined with a scintillating crystal
    J.G. Rocha; C.G.J. Schabmueller; N.F. Ramos; S. Lanceros-Mendez; M.F. Costa; A.G.R. Evans; R.F. Wolffenbuttel; J.H. Correia;
    Journal of Micromechanics and Microengineering,
    Volume 13, Issue 4, pp. 45-50, 2003.

  196. Electro-mechanical feedback for realization of a mechanical spectrum analyzer
    E. Cretu; L.A. Machado da Rocha; R.F. Wolffenbuttel;
    IEEE, , pp. 1407-1410, 2003.

  197. Biosystem with 16 highly-selective optical-channels for biological fluids anlysis in the visible spectrum
    G. Minas; J.C. Ribeiro; S. Lanceros-Mendez; F. Vaz; R.F. Wolffenbuttel; J.H. Correia;
    s.n. (Ed.);
    IEEE, , pp. 1251-1254, 2003.

  198. Dynamics of pull-in: analysis of the Meta-stable regime
    L.A. Machado da Rocha; E. Cretu; R.F. Wolffenbuttel;
    s.n. (Ed.);
    s.n., , pp. 57-60, 2003.

  199. Integrated silicon infrared microspectrometers
    S.H. Kong; G. de Graaf; R.F. Wolffenbuttel;
    T Gregorkiewicz; RG Elliman; PM Fauchet; JA Hutchby (Ed.);
    Materials Research Society, , pp. 1-10, 2003. CD-ROM.

  200. Thermo-electric performance of poly-Si0.7Ge0.3
    D.D.L. Wijngaards; R.F. Wolffenbuttel;
    T Gregorkiewicz; RG Elliman; PM Fauchet; JA Hutchby (Ed.);
    Materials Research Society, , pp. 1-7, 2003. CD-ROM.

  201. A 16 fabry-perot optical-channels array for biological fluids analysis using white light
    G. Minas; J.C. Ribeiro; J.S. Martins; R.F. Wolffenbuttel; J.H. Correia;
    s.n. (Ed.);
    University of Minho, , pp. 28-30, 2003.

  202. Performance of integrated silicon infrared microspectrometers
    S.H. Kong; G. de Graaf; L.A. Machado da Rocha; R.F. Wolffenbuttel;
    s.n. (Ed.);
    IEEE, , pp. 707-710, 2003.

  203. 2-D modeling and simulation of fluidic microsystems for biological fluids analysis
    G. Minas; J.C. Ribeiro; R.F. Wolffenbuttel; J.H. Correia;
    s.n. (Ed.);
    s.n., , pp. 239-242, 2003.

  204. New concept for the linearisation of sensor bridge circuits
    G. de Graaf; R.F. Wolffenbuttel;
    s.n. (Ed.);
    University of Minho, , pp. 835-838, 2003.

  205. Electro-mechanical compensation of the temperature coefficient of the pull-in voltage of microstructures
    L.A. Machado da Rocha; E. Cretu; R.F. Wolffenbuttel;
    s.n. (Ed.);
    University of Minho, , pp. 68-71, 2003.

  206. Comparison between bulk micromachined and CMOS detectors for x-ray measurements
    J.G. Rocha; C.G.J. Schabmueller; N.F. Ramos; S. Lanceros-Mendez; M.V. Moreia; A.G.R. Evans; R.F. Wolffenbuttel; J.H. Correia;
    s.n. (Ed.);
    University of Minho, , pp. 384-385, 2003.

  207. Displacement model for dynamic pull-in analysis and application in large-stroke electrostatic actuators
    L.A. Machado da Rocha; E. Cretu; R.F. Wolffenbuttel;
    s.n. (Ed.);
    University of Minho, , pp. 448-451, 2003.

  208. CMOS x-ray imager for dental radiography
    N.F. Ramos; J.G. Rocha; S. Lanceros-Mendez; R.F. Wolffenbuttel; J.H. Correia;
    s.n. (Ed.);
    University of Minho, , pp. 208-209, 2003.

  209. Linearisation of Piezoresistive pressure sensor readout
    G. de Graaf; R.F. Wolffenbuttel;
    s.n. (Ed.);
    s.n., , pp. 207-210, 2003.

  210. Mechanical spectrum analyzer in silicon using micromachined accelerometers with time-varying electrostatic feedback
    L.A. Machado da Rocha; E. Cretu; G. de Graaf; R.F. Wolffenbuttel;
    s.n. (Ed.);
    IEEE, , pp. 1197-1201, 2003.

  211. Werkwijze voor het uitvoeren van een assay, inrichting daarvoor, alsmede een werkwijze voor het vervaardigen van een inrichting
    V.P. Iordanov; P.M. Sarro; R.F. Wolffenbuttel; M.J. Vellekoop;
    2003. niet eerder opgenomen; 1017989; niet eerder opgenomen.

  212. A single-chip CMOS optical microspectrometer with light-to-frequency converter and bus interface
    J.H. Correia; G. de Graaf; M. Bartek; R.F. Wolffenbuttel;
    IEEE Journal of Solid State Circuits,
    Volume 37, Issue 10, pp. 1344-1347, 2002.

  213. Silicon thin-film UV filter for NADH fluorescence analysis
    V.P. Iordanov; G.W. Lubking; R. Ishihara; R.F. Wolffenbuttel; P.M. Sarro; M.J. Vellekoop;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume A 97-98, pp. 161-166, 2002.

  214. MEMS technology in eletrical metrology
    R.F. Wolffenbuttel;
    Japanese Jounal of the Society On Instrumentation and Control Engineering,
    Volume 41, Issue 1, pp. 102-107, 2002.

  215. A CMOS optical microspectrometer with light-to-frequency converter, bus interface, and stray-light compensation
    J.H. Correia; G. de Graaf; M. Bartek; R.F. Wolffenbuttel;
    IEEE Transactions on Instrumentation and Measurement,
    Volume 50, Issue 6, pp. 1530-1537, 2002.

  216. Micro-instrumentation systems in silicon: covering: 2001
    R.F. Wolffenbuttel;
    Delft Univerity of Technology, Faculty ITS, , 2002. Interim report.

  217. The pull-in of symmetrically and asymmetrically driven microstructures and the use in DC voltage references
    L.A. Machado da Rocha; E. Cretu; R.F. Wolffenbuttel;
    IEEE, , pp. 759-764, 2002.

  218. X-ray detector based on bulk micromachined photodiode
    J.G. Rocha; C.G.J. Schabmueller; N.F. Ramos; S. Lanceros-Mendez; A.G.R. Evans; R.F. Wolffenbuttel; J.H. Correia;
    Nat. Inst. for Res. and Development in Microtechnologies, , pp. 323-326, 2002.

  219. Design of a single-chip micro-thermostat employing both active heating and active cooling
    D.D.L. Wijngaards; G. de Graaf; R.F. Wolffenbuttel;
    Nat. Inst. of Res. and Development in Microtechnologies, , pp. 189-192, 2002.

  220. Integrated CMOS optical microsystem for illuminating source identification
    G. de Graaf; R.F. Wolffenbuttel;
    IEEE Instrumentation and Measurement Society, , pp. 1-4, 2002.

  221. Stability of voltage references based on the pull-in of a micromechanical structure
    L.A. Machado da Rocha; R.F. Wolffenbuttel;
    Czech Technical University, , pp. 723-726, 2002.

  222. Hysteresis in the pull-in of microstructures
    L.A. Machado da Rocha; R.F. Wolffenbuttel;
    Nat. Inst. for Res. and Development in Microtechnologies, , pp. 335-338, 2002.

  223. CMOS sensor system for measuring environmental light conditions
    G. de Graaf; R.F. Wolffenbuttel;
    Czech Technical University, , pp. 415-418, 2002.

  224. Single-chip micro-thermostat for stabilisation at ambient temperature applying both active cooling and heating
    D.D.L. Wijngaards; R.F. Wolffenbuttel;
    Czech Technical University, , pp. 425-428, 2002.

  225. Lab-on-a-chip for measuring uric acid in biological fluids
    G. Minas; J.S. Martins; C. Pereira; C. Lima; R.F. Wolffenbuttel; J.H. Correia;
    Czech Technical University, , pp. 66-69, 2002.

  226. Stability of silicon microfabricated pull-in voltage references
    L.A. Machado da Rocha; R.F. Wolffenbuttel;
    IEEE, , pp. 172-173, 2002.

  227. CMOS x-rays microdetector based on scintillating light guides
    J.G. Rocha; N.F. Ramos; M.V. Mareira; S. Lanceros-Mendez; R.F. Wolffenbuttel; J.H. Correia;
    Czech Technical University, , pp. 525-528, 2002.

  228. ThP39 Temperature stability improvement of on-chip reference elements using integrated Peltier coolers
    D.D.L. Wijngaards; R.F. Wolffenbuttel;
    IEEE, , pp. 522-523, 2002.

  229. Method of performing an assay, apparatus therefor, and a method of manufacturing and apparatus
    V.P. Iordanov; P.M. Sarro; R.F. Wolffenbuttel; M.J. Vellekoop;
    2002. niet eerder gehonnoreerd; WO 02/090945 A2; niet eerder gehonnoreerd.

  230. The relationship between microsystem technology and metrology
    R.F. Wolffenbuttel; C.J. Mullem;
    IEEE Transactions on Instrumentation and Measurement,
    Volume 50, Issue 6, pp. 1469-1475, 2001.

  231. IC fabrication-compatible processing for instrumentation and measurement applications
    D.D.L. Wijngaards; R.F. Wolffenbuttel;
    IEEE Transactions on Instrumentation and Measurement,
    Volume 50, Issue 6, pp. 1475-1484, 2001.

  232. Bulk micromachined electrostatic RMS-to-DC converter
    G. de Graaf; M. Bartek; Z. Xiao; C.J. Mullem; R.F. Wolffenbuttel;
    IEEE Transactions on Instrumentation and Measurement,
    Volume 50, Issue 6, pp. 1508-1512, 2001.

  233. Integrated silicon: microspectrometers
    S.H. Kong; A. Correia; G. de Graaf; M. Bartek; R.F. Wolffenbuttel;
    IEEE Instrumentation and Measurement Magazine,
    Volume 4, Issue 3, pp. 34-38, 2001.

  234. Infrared micro-spectrometer based on a diffraction grating
    S.H. Kong; D.D.L. Wijngaards; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 92, pp. 88-95, 2001.

  235. Microchemical voltage reference using the pull-in of a beam
    E. Cretu; L.A. Machado da Rocha; R.F. Wolffenbuttel;
    IEEE Transactions on Instrumentation and Measurement,
    Volume 50, Issue 6, pp. 1504-1507, 2001. niet eerder opgevoerd.

  236. Thermophysical characterisation of PolySi0,7Ce0,3 for use in thermoelectric devices
    D.D.L. Wijngaards; S.H. Kong; P.M. Sarro; R.F. Wolffenbuttel;
    {E Obermeier} (Ed.);
    Springer, , pp. 1010-1013, 2001.

  237. Fabrication and optical measurements of multi-slit grating based infrared micro-spectrometer
    S.H. Kong; D.D.L. Wijngaards; G. de Graaf; R.F. Wolffenbuttel;
    {E Obermeier} (Ed.);
    Springer, , pp. 548-551, 2001.

  238. Si based thin-film filter with high visible-over-UV selectivity for biochemical fluorescence analysis
    V.P. Jordanov; W. Lubking; R. Ishihara; R.F. Wolffenbuttel; P.M. Sarro; M.J. Vellekoop;
    {E Obermeier} (Ed.);
    Springer, , pp. 1-4, 2001.

  239. Using the pull-in voltage as voltage reference
    E. Cretu; D. Rocha; R.F. Wolffenbuttel;
    {E Obermeier} (Ed.);
    Springer, , pp. 1-3, 2001.

  240. Evaluation of an oscilloscope training course
    G. de Graaf; D.D.L. Wijngaards; R.F. Wolffenbuttel;
    University of Twente, , pp. 67-74, 2001.

  241. Silicon photodetectors with a selective spectral response
    R.F. Wolffenbuttel;
    {H. Baltes}; {J Hesse}; {J.G. Korvink} (Ed.);
    Wiley, , pp. 69-101, 2001.

  242. Polycrystalline silicon thin-film on glass as a UV filter for NADH fluorescence measuremants
    V.P. Jordanov; R. Ishihara; P.M. Sarro; M.J. Vellekoop; R.F. Wolffenbuttel; J. Bastemeijer; A. Bossche;
    STW Technology Foundation, , pp. 799-802, 2001.

  243. Integrated high rejection filter for NADH fluorescence measuremnts
    V.P. Jordanov; W. Lubking; P.M. Sarro; R.F. Wolffenbuttel; M.J. Vellekoop;
    AMA Service, , pp. 107-111, 2001.

  244. Design of a pull-in voltage reference structure
    D. Rocha; E. Cretu; R.F. Wolffenbuttel;
    s.n., , pp. 285-288, 2001.

  245. Temperature profile comparison of various substrate geometries for passive heat sinks
    D.D.L. Wijngaards; G. de Graaf; S.H. Kong; R.F. Wolffenbuttel;
    s.n., , pp. 143-146, 2001.

  246. Study of the behaviour of various substrate geometries for use as passive heat sink
    D.D.L. Wijngaards; G. de Graaf; S.H. Kong; R.F. Wolffenbuttel;
    {M Elwenspoek} (Ed.);
    Kluwer, , pp. 47-52, 2001.

  247. Spectral analysis through electromechanical coupling
    E. Cretu; M. Bartek; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 85, Issue 1-3, pp. 23-32, 2000.

  248. Ultraviolet-selective avalanche photodiode
    A. Pauchard; P.A. Besse; M. Bartek; R.F. Wolffenbuttel; R.S. Popovic;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 82, Issue 1-3, pp. 128-134, 2000.

  249. Single-chip CMOS optical microspectrometer
    J.H.G. Correia; G. de Graaf; S.H. Kong; M. Bartek; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 82, Issue 1-3, pp. 191-197, 2000.

  250. High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum
    J.H.G. Correia; M. Bartek; R.F. Wolffenbuttel;
    IEEE Transactions on Electron Devices,
    Volume 47, Issue 3, pp. 553-559, 2000.

  251. Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices
    D.D.L. Wijngaards; S.H. Kong; M. Bartek; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 85, Issue 1-3, pp. 316-323, 2000.

  252. Post-processing modules in IC-compatible microsystem fabrication
    D.D.L. Wijngaards; R.F. Wolffenbuttel;
    {R.F. Wolffenbuttel}; {D.D.L. Wijngaards}; {C.J. Mullem}, van (Ed.);
    s.n., , pp. 41-58, 2000.

  253. Editorship
    R.F. Wolffenbuttel; D.D.L. Wijngaards; C.J. van Mullem;
    s.n., , pp. -, 2000.

  254. Optical characterization of silicon-compatible materials
    R.F. Wolffenbuttel;
    {R.F. Wolffenbuttel}; {D.D.L. Wijngaards}; {C.J. Mullem}, van (Ed.);
    s.n., , pp. 79-90, 2000.

  255. Modelling of integrated Peltier elements
    D.D.L. Wijngaards; E. Cretu; S.H. Kong; R.F. Wolffenbuttel;
    {M Laudon}; {B Romanowicz} (Ed.);
    Computational publications, , pp. 652-655, 2000.

  256. Fabrication and application of on-chip integrated polySiGe and polySi Peltier elements
    D.D.L. Wijngaards; S.H. Kong; R.F. Wolffenbuttel;
    {Y Bäcklund}; {C Hedlund} (Ed.);
    s.n., , pp. 1-4, 2000.

  257. Fabrication of an integrated silicon infrared micro-spectrometer
    S.H. Kong; D.D.L. Wijngaards; R.F. Wolffenbuttel;
    {Y Bäcklund}; {C Hedlund} (Ed.);
    s.n., , pp. 1-4, 2000.

  258. Bulk-micromachined electrostatic RMS-to-DC converter: design and fabrication
    M. Bartek; Z. Xiao; C.J. van Mullem; R.F. Wolffenbuttel;
    s.n., , pp. 1-4, 2000.

  259. Modelling of integrated polySiGe Peltier elements
    D.D.L. Wijngaards; E. Cretu; S.H. Kong; R.F. Wolffenbuttel;
    s.n., , pp. 1-4, 2000.

  260. Infrared micro-spectrometer based on a diffraction grating
    S.H. Kong; D.D.L. Wijngaards; M. Bartek; R.F. Wolffenbuttel;
    {R Reus}, de; {S Bouwstra} (Ed.);
    Mikroelektronik Centret, , pp. 321-324, 2000.

  261. Bulk-micromachined tunable Fabry-Perot microinterferometer for the visible spectral range
    J.H.G. Correia; M. Bartek; R.F. Wolffenbuttel;
    Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers,
    Volume 76, Issue 1-3, pp. 191-196, 1999.

  262. Silver-based reflective coatings for micromachined optical filters
    M. Bartek; J.H.G. Correia; R.F. Wolffenbuttel;
    Journal of Micromechanics and Microengineering,
    Volume 9, pp. 162-165, 1999.

  263. Micro-instrumentation systems in silicon
    R.F. Wolffenbuttel;
    Delft University of Technology, , 1999.

  264. Hermetic packages and feedthroughs for neural prostheses (Quarterly progress report 5)
    R.F. Wolffenbuttel;
    National Institutes of Health, NINDS, , 1999. N01-NS-8-2387.

  265. Spectral analysis through electromechanical coupling
    E. Cretu; M. Bartek; R.F. Wolffenbuttel;
    {M. Bartek} (Ed.);
    Delft University of Technology, , pp. 789-790, 1999.

  266. On-chip integrated CMOS optical microspectrometer with light-to-frequency converter and bus interface
    G. de Graaf; J.H.G. Correia; M. Bartek; R.F. Wolffenbuttel;
    {JH. Wuorinen} (Ed.);
    IEEE, , pp. 208-209, 1999.

  267. Optical microspectrometer using a micro-instrumentation platform
    M. Bartek; J.H.G. Correia; G. de Graaf; R.F. Wolffenbuttel;
    s.n., , pp. 99-106, 1999.

  268. Stray-light compensation in thin-film Fabry-Perot optical filters: application to an on-chip spectrometer
    M. Bartek; J.H.G. Correia; S.H. Kong; R.F. Wolffenbuttel;
    Institute of Electrical Engineers of Japan, , pp. 240-243, 1999.

  269. Thermal stabilisation of integrated silicon platforms using polysilicon and SiGe Peltier elements
    D.D.L. Wijngaards; S.H. Kong; M. Bartek; R.F. Wolffenbuttel;
    Institute of Electrical Engineers of Japan, , pp. 310-313, 1999.

  270. Accelerometer with electrically tunable spectral sensitivity
    E. Cretu; M. Bartek; R.F. Wolffenbuttel;
    Institute of Electrical Engineers of Japan, , pp. 1298-1301, 1999.

  271. Ultraviolet-selective avalanche photodiode
    A. Pauchard; P.A. Besse; M. Bartek; R.F. Wolffenbuttel; R.S. Popovic;
    Institute of Electrical Engineers of Japan, , pp. 236-239, 1999.

  272. Analytical modelling for accelerometers with electrically tunable sensitivity
    E. Cretu; M. Bartek; R.F. Wolffenbuttel;
    s.n., , pp. 601-604, 1999.

  273. Single-chip CMOS optical microspectrometer
    J.H.G. Correia; G. de Graaf; S.H. Kong; M. Bartek; R.F. Wolffenbuttel;
    Institute of Electrical Engineers of Japan, , pp. 869-899, 1999.

  274. Study of active on-chip cooling using integrated Peltier elements
    S.H. Kong; D.D.L. Wijngaards; M. Bartek; R.F. Wolffenbuttel;
    {M. Bartek} (Ed.);
    Delft University of Technology, , pp. 319-322, 1999.

BibTeX support

Last updated: 22 Aug 2023

Reinoud Wolffenbuttel

PhD students

MSc students